Rotational stage for high speed, large area scanning in focused beam systems

US6777688

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Bibliographic Details
Main Authors:	LIU, YONG YU, CHAN, DANIEL S. H., PHANG, JACOB C. H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32682
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32682
record_format	dspace
spelling	sg-nus-scholar.10635-326822015-07-29T07:03:51Z Rotational stage for high speed, large area scanning in focused beam systems LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H. ELECTRICAL & COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US6777688 Granted Patent 2012-05-02T02:28:49Z 2012-05-02T02:28:49Z 2004-08-17 Patent LIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2004-08-17). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32682 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6777688
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H.
format	Patent
author	LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H.
spellingShingle	LIU, YONG YU CHAN, DANIEL S. H. PHANG, JACOB C. H. Rotational stage for high speed, large area scanning in focused beam systems
author_sort	LIU, YONG YU
title	Rotational stage for high speed, large area scanning in focused beam systems
title_short	Rotational stage for high speed, large area scanning in focused beam systems
title_full	Rotational stage for high speed, large area scanning in focused beam systems
title_fullStr	Rotational stage for high speed, large area scanning in focused beam systems
title_full_unstemmed	Rotational stage for high speed, large area scanning in focused beam systems
title_sort	rotational stage for high speed, large area scanning in focused beam systems
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32682
_version_	1681081267750174720

Rotational stage for high speed, large area scanning in focused beam systems

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