CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING

Ph.D

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Bibliographic Details
Main Author:	FENG YONG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	Critical Dimension, Thermal Processing, MMPC, Lithography, Temperature control, real-time control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/35821
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-35821
record_format	dspace
spelling	sg-nus-scholar.10635-358212015-08-17T19:54:07Z CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING FENG YONG ELECTRICAL & COMPUTER ENGINEERING HO WENG KHUEN Critical Dimension, Thermal Processing, MMPC, Lithography, Temperature control, real-time control Ph.D DOCTOR OF PHILOSOPHY 2012-12-31T18:01:14Z 2012-12-31T18:01:14Z 2011-01-07 Thesis FENG YONG (2011-01-07). CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/35821 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Critical Dimension, Thermal Processing, MMPC, Lithography, Temperature control, real-time control
spellingShingle	Critical Dimension, Thermal Processing, MMPC, Lithography, Temperature control, real-time control FENG YONG CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING FENG YONG
format	Theses and Dissertations
author	FENG YONG
author_sort	FENG YONG
title	CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
title_short	CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
title_full	CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
title_fullStr	CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
title_full_unstemmed	CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING
title_sort	critical dimension and temperature control in multi-zone thermal processing
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/35821
_version_	1681081626708148224

CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI-ZONE THERMAL PROCESSING

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