Excimer laser applications in integrated circuit packaging

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Lu, Y.F., Hong, M.H., Chan, D.S.H., Low, T.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50621
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Institution: National University of Singapore
id sg-nus-scholar.10635-50621
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spelling sg-nus-scholar.10635-506212015-01-17T02:48:15Z Excimer laser applications in integrated circuit packaging Lu, Y.F. Hong, M.H. Chan, D.S.H. Low, T.S. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Materials Research Society Symposium - Proceedings 397 323-328 MRSPD 2014-04-23T03:01:33Z 2014-04-23T03:01:33Z 1996 Conference Paper Lu, Y.F.,Hong, M.H.,Chan, D.S.H.,Low, T.S. (1996). Excimer laser applications in integrated circuit packaging. Materials Research Society Symposium - Proceedings 397 : 323-328. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/50621 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Lu, Y.F.
Hong, M.H.
Chan, D.S.H.
Low, T.S.
format Conference or Workshop Item
author Lu, Y.F.
Hong, M.H.
Chan, D.S.H.
Low, T.S.
spellingShingle Lu, Y.F.
Hong, M.H.
Chan, D.S.H.
Low, T.S.
Excimer laser applications in integrated circuit packaging
author_sort Lu, Y.F.
title Excimer laser applications in integrated circuit packaging
title_short Excimer laser applications in integrated circuit packaging
title_full Excimer laser applications in integrated circuit packaging
title_fullStr Excimer laser applications in integrated circuit packaging
title_full_unstemmed Excimer laser applications in integrated circuit packaging
title_sort excimer laser applications in integrated circuit packaging
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/50621
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