A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers

• Main Authors: Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Electrostatic drive; First harmonic (2f); Lock-in; Lorentzian curve-fitting; Resonance Curve Area (RCA)
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/50836

10.1117/12.462859