A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers
10.1117/12.462859
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sg-nus-scholar.10635-508362024-11-14T17:55:12Z A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers Logeeswaran, V.J. Tay, F.E.H. Chan, M.L. Chau, F.S. Liang, Y.C. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Electrostatic drive First harmonic (2f) Lock-in Lorentzian curve-fitting Resonance Curve Area (RCA) 10.1117/12.462859 Proceedings of SPIE - The International Society for Optical Engineering 4755 584-593 PSISD 2014-04-24T07:18:50Z 2014-04-24T07:18:50Z 2002 Article Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2002). A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 584-593. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462859 0277786X http://scholarbank.nus.edu.sg/handle/10635/50836 000176995300067 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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Electrostatic drive First harmonic (2f) Lock-in Lorentzian curve-fitting Resonance Curve Area (RCA) |
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Electrostatic drive First harmonic (2f) Lock-in Lorentzian curve-fitting Resonance Curve Area (RCA) Logeeswaran, V.J. Tay, F.E.H. Chan, M.L. Chau, F.S. Liang, Y.C. A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| description |
10.1117/12.462859 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Logeeswaran, V.J. Tay, F.E.H. Chan, M.L. Chau, F.S. Liang, Y.C. |
| format |
Article |
| author |
Logeeswaran, V.J. Tay, F.E.H. Chan, M.L. Chau, F.S. Liang, Y.C. |
| author_sort |
Logeeswaran, V.J. |
| title |
A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| title_short |
A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| title_full |
A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| title_fullStr |
A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| title_full_unstemmed |
A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers |
| title_sort |
2f method for the measurement of resonant frequency and q-factor of micromechanical transducers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/50836 |
| _version_ |
1821197416677769216 |