Characterization of ELID grinding process for machining silicon wafers

10.1016/j.jmatprotec.2007.06.077

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Bibliographic Details
Main Authors:	Islam, M.M., Kumar, A.S., Balakumar, S., Lim, H.S., Rahman, M.
Other Authors:	TROPICAL MARINE SCIENCE INSTITUTE
Format:	Article
Published:	2014
Subjects:	ELID grinding Grinding performance Machining silicon wafers Self-sharpening ability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51351
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51351
record_format	dspace
spelling	sg-nus-scholar.10635-513512023-10-25T07:19:10Z Characterization of ELID grinding process for machining silicon wafers Islam, M.M. Kumar, A.S. Balakumar, S. Lim, H.S. Rahman, M. TROPICAL MARINE SCIENCE INSTITUTE MECHANICAL ENGINEERING ELID grinding Grinding performance Machining silicon wafers Self-sharpening ability 10.1016/j.jmatprotec.2007.06.077 Journal of Materials Processing Technology 198 1-3 281-290 JMPTE 2014-04-24T09:31:40Z 2014-04-24T09:31:40Z 2008-03-03 Article Islam, M.M., Kumar, A.S., Balakumar, S., Lim, H.S., Rahman, M. (2008-03-03). Characterization of ELID grinding process for machining silicon wafers. Journal of Materials Processing Technology 198 (1-3) : 281-290. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.06.077 09240136 http://scholarbank.nus.edu.sg/handle/10635/51351 000252564100041 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	ELID grinding Grinding performance Machining silicon wafers Self-sharpening ability
spellingShingle	ELID grinding Grinding performance Machining silicon wafers Self-sharpening ability Islam, M.M. Kumar, A.S. Balakumar, S. Lim, H.S. Rahman, M. Characterization of ELID grinding process for machining silicon wafers
description	10.1016/j.jmatprotec.2007.06.077
author2	TROPICAL MARINE SCIENCE INSTITUTE
author_facet	TROPICAL MARINE SCIENCE INSTITUTE Islam, M.M. Kumar, A.S. Balakumar, S. Lim, H.S. Rahman, M.
format	Article
author	Islam, M.M. Kumar, A.S. Balakumar, S. Lim, H.S. Rahman, M.
author_sort	Islam, M.M.
title	Characterization of ELID grinding process for machining silicon wafers
title_short	Characterization of ELID grinding process for machining silicon wafers
title_full	Characterization of ELID grinding process for machining silicon wafers
title_fullStr	Characterization of ELID grinding process for machining silicon wafers
title_full_unstemmed	Characterization of ELID grinding process for machining silicon wafers
title_sort	characterization of elid grinding process for machining silicon wafers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51351
_version_	1781411679709429760

Characterization of ELID grinding process for machining silicon wafers

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