Advanced ELID process development for grinding silicon wafers
Materials Research Society Symposium Proceedings
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2014
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sg-nus-scholar.10635-515582015-01-15T23:04:33Z Advanced ELID process development for grinding silicon wafers Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. TROPICAL MARINE SCIENCE INSTITUTE MECHANICAL ENGINEERING Materials Research Society Symposium Proceedings 867 97-104 MRSPD 2014-04-24T10:15:07Z 2014-04-24T10:15:07Z 2005 Conference Paper Islam, M.M.,Senthil Kumar, A.,Balakumar, S.,Lim, H.S.,Rahman, M. (2005). Advanced ELID process development for grinding silicon wafers. Materials Research Society Symposium Proceedings 867 : 97-104. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/51558 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium Proceedings |
| author2 |
TROPICAL MARINE SCIENCE INSTITUTE |
| author_facet |
TROPICAL MARINE SCIENCE INSTITUTE Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. |
| format |
Conference or Workshop Item |
| author |
Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. |
| spellingShingle |
Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. Advanced ELID process development for grinding silicon wafers |
| author_sort |
Islam, M.M. |
| title |
Advanced ELID process development for grinding silicon wafers |
| title_short |
Advanced ELID process development for grinding silicon wafers |
| title_full |
Advanced ELID process development for grinding silicon wafers |
| title_fullStr |
Advanced ELID process development for grinding silicon wafers |
| title_full_unstemmed |
Advanced ELID process development for grinding silicon wafers |
| title_sort |
advanced elid process development for grinding silicon wafers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/51558 |
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1681083868110651392 |