Micro-patterned porous silicon using proton beam writing

AIP Conference Proceedings

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Bibliographic Details
Main Authors:	Breese, M.B.H., Mangaiyarkarasi, D., Teo, E.J., Bettiol, A.A., Blackwood, D.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/52641
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-52641
record_format	dspace
spelling	sg-nus-scholar.10635-526412015-02-28T05:15:09Z Micro-patterned porous silicon using proton beam writing Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D. MATERIALS SCIENCE AND ENGINEERING PHYSICS AIP Conference Proceedings 866 269-274 2014-05-16T07:03:09Z 2014-05-16T07:03:09Z 2006 Conference Paper Breese, M.B.H.,Mangaiyarkarasi, D.,Teo, E.J.,Bettiol, A.A.,Blackwood, D. (2006). Micro-patterned porous silicon using proton beam writing. AIP Conference Proceedings 866 : 269-274. ScholarBank@NUS Repository. 0735403651 0094243X http://scholarbank.nus.edu.sg/handle/10635/52641 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	AIP Conference Proceedings
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D.
format	Conference or Workshop Item
author	Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D.
spellingShingle	Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D. Micro-patterned porous silicon using proton beam writing
author_sort	Breese, M.B.H.
title	Micro-patterned porous silicon using proton beam writing
title_short	Micro-patterned porous silicon using proton beam writing
title_full	Micro-patterned porous silicon using proton beam writing
title_fullStr	Micro-patterned porous silicon using proton beam writing
title_full_unstemmed	Micro-patterned porous silicon using proton beam writing
title_sort	micro-patterned porous silicon using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/52641
_version_	1681084019220938752

Micro-patterned porous silicon using proton beam writing

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