Micro-patterned porous silicon using proton beam writing

AIP Conference Proceedings

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Bibliographic Details
Main Authors:	Breese, M.B.H., Mangaiyarkarasi, D., Teo, E.J., Bettiol, A.A., Blackwood, D.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/52641
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-52641
record_format	dspace
spelling	sg-nus-scholar.10635-526412024-11-14T18:39:07Z Micro-patterned porous silicon using proton beam writing Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D. PHYSICS MATERIALS SCIENCE AND ENGINEERING AIP Conference Proceedings 866 269-274 2014-05-16T07:03:09Z 2014-05-16T07:03:09Z 2006 Conference Paper Breese, M.B.H.,Mangaiyarkarasi, D.,Teo, E.J.,Bettiol, A.A.,Blackwood, D. (2006). Micro-patterned porous silicon using proton beam writing. AIP Conference Proceedings 866 : 269-274. ScholarBank@NUS Repository. 0735403651 0094243X http://scholarbank.nus.edu.sg/handle/10635/52641 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	AIP Conference Proceedings
author2	PHYSICS
author_facet	PHYSICS Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D.
format	Conference or Workshop Item
author	Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D.
spellingShingle	Breese, M.B.H. Mangaiyarkarasi, D. Teo, E.J. Bettiol, A.A. Blackwood, D. Micro-patterned porous silicon using proton beam writing
author_sort	Breese, M.B.H.
title	Micro-patterned porous silicon using proton beam writing
title_short	Micro-patterned porous silicon using proton beam writing
title_full	Micro-patterned porous silicon using proton beam writing
title_fullStr	Micro-patterned porous silicon using proton beam writing
title_full_unstemmed	Micro-patterned porous silicon using proton beam writing
title_sort	micro-patterned porous silicon using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/52641
_version_	1821223089080369152

Micro-patterned porous silicon using proton beam writing

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