Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

10.1016/j.mser.2006.10.001

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Bibliographic Details
Main Authors:	Xie, X.N., Chung, H.J., Sow, C.H., Wee, A.T.S.
Other Authors:	NUS NANOSCIENCE & NANOTECH INITIATIVE
Format:	Review
Published:	2014
Subjects:	Anodic oxidation Atomic force microscopy Atomic force microscopy nanolithography Dip-pen nanolithography Nanolithography Scanning force microscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/53348
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-53348
record_format	dspace
spelling	sg-nus-scholar.10635-533482023-08-24T07:20:02Z Nanoscale materials patterning and engineering by atomic force microscopy nanolithography Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S. NUS NANOSCIENCE & NANOTECH INITIATIVE PHYSICS Anodic oxidation Atomic force microscopy Atomic force microscopy nanolithography Dip-pen nanolithography Nanolithography Scanning force microscopy 10.1016/j.mser.2006.10.001 Materials Science and Engineering R: Reports 54 1-2 1-48 MIGIE 2014-05-19T02:57:24Z 2014-05-19T02:57:24Z 2006-11-01 Review Xie, X.N., Chung, H.J., Sow, C.H., Wee, A.T.S. (2006-11-01). Nanoscale materials patterning and engineering by atomic force microscopy nanolithography. Materials Science and Engineering R: Reports 54 (1-2) : 1-48. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mser.2006.10.001 0927796X http://scholarbank.nus.edu.sg/handle/10635/53348 000243844700001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Anodic oxidation Atomic force microscopy Atomic force microscopy nanolithography Dip-pen nanolithography Nanolithography Scanning force microscopy
spellingShingle	Anodic oxidation Atomic force microscopy Atomic force microscopy nanolithography Dip-pen nanolithography Nanolithography Scanning force microscopy Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S. Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
description	10.1016/j.mser.2006.10.001
author2	NUS NANOSCIENCE & NANOTECH INITIATIVE
author_facet	NUS NANOSCIENCE & NANOTECH INITIATIVE Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S.
format	Review
author	Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S.
author_sort	Xie, X.N.
title	Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
title_short	Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
title_full	Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
title_fullStr	Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
title_full_unstemmed	Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
title_sort	nanoscale materials patterning and engineering by atomic force microscopy nanolithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/53348
_version_	1775626805044051968

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

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