3D profile simulation of metal nanostructures obtained by closely packed nanosphere lithography

3D profile simulation of metal nanostructures obtained by closely packed nanosphere lithography

10.1007/s11468-010-9132-0

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Bibliographic Details
Main Authors: Zhou, X., Liu, K.Y., Knoll, W., Quan, C., Zhang, N.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Nanosphere lithography (NSL)
Nanospheres
Nanostructures
Simulation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53866
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Institution: National University of Singapore
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