A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror
10.1088/0960-1317/15/10/025
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2014
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sg-nus-scholar.10635-545632024-11-14T17:55:12Z A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror Zhao, Y. Tay, F.E.H. Chau, F.S. Zhou, G. MECHANICAL ENGINEERING 10.1088/0960-1317/15/10/025 Journal of Micromechanics and Microengineering 15 10 1972-1978 JMMIE 2014-06-16T09:32:26Z 2014-06-16T09:32:26Z 2005-10-01 Article Zhao, Y., Tay, F.E.H., Chau, F.S., Zhou, G. (2005-10-01). A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror. Journal of Micromechanics and Microengineering 15 (10) : 1972-1978. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/15/10/025 09601317 http://scholarbank.nus.edu.sg/handle/10635/54563 000233093900033 Scopus |
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| description |
10.1088/0960-1317/15/10/025 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Zhao, Y. Tay, F.E.H. Chau, F.S. Zhou, G. |
| format |
Article |
| author |
Zhao, Y. Tay, F.E.H. Chau, F.S. Zhou, G. |
| spellingShingle |
Zhao, Y. Tay, F.E.H. Chau, F.S. Zhou, G. A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| author_sort |
Zhao, Y. |
| title |
A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| title_short |
A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| title_full |
A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| title_fullStr |
A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| title_full_unstemmed |
A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| title_sort |
nonlinearity compensation approach based on delaunay triangulation to linearize the scanning field of dual-axis micromirror |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54563 |
| _version_ |
1821196558507442176 |