Tay, A., Chua, H., Wang, Y., Ngo, Y., & ENGINEERING, E. &. C. (2014). Equipment design and control of advanced thermal-processing module in lithography.

Tay, A., H.T Chua, Y. Wang, Y.S Ngo, and ELECTRICAL & COMPUTER ENGINEERING. Equipment Design and Control of Advanced Thermal-processing Module in Lithography. 2014.

Tay, A., et al. Equipment Design and Control of Advanced Thermal-processing Module in Lithography. 2014.