Imaging with surface sensitive backscattered electrons

10.1116/1.2781523

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Bibliographic Details
Main Authors:	Luo, T., Khursheed, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56257
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56257
record_format	dspace
spelling	sg-nus-scholar.10635-562572023-10-29T23:02:40Z Imaging with surface sensitive backscattered electrons Luo, T. Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2781523 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 6 2017-2019 JVTBD 2014-06-17T02:52:33Z 2014-06-17T02:52:33Z 2007 Article Luo, T., Khursheed, A. (2007). Imaging with surface sensitive backscattered electrons. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (6) : 2017-2019. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2781523 10711023 http://scholarbank.nus.edu.sg/handle/10635/56257 000251611900047 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2781523
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Luo, T. Khursheed, A.
format	Article
author	Luo, T. Khursheed, A.
spellingShingle	Luo, T. Khursheed, A. Imaging with surface sensitive backscattered electrons
author_sort	Luo, T.
title	Imaging with surface sensitive backscattered electrons
title_short	Imaging with surface sensitive backscattered electrons
title_full	Imaging with surface sensitive backscattered electrons
title_fullStr	Imaging with surface sensitive backscattered electrons
title_full_unstemmed	Imaging with surface sensitive backscattered electrons
title_sort	imaging with surface sensitive backscattered electrons
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56257
_version_	1781781138690277376

Imaging with surface sensitive backscattered electrons

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