Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication
Applied Optics
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sg-nus-scholar.10635-565842015-02-24T03:59:37Z Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. ELECTRICAL & COMPUTER ENGINEERING CIVIL & ENVIRONMENTAL ENGINEERING Applied Optics 50 35 6536-6542 APOPA 2014-06-17T02:56:15Z 2014-06-17T02:56:15Z 2011-12-10 Article Tang, M.,Chen, Z.C.,Huang, Z.Q.,Choo, Y.S.,Hong, M.H. (2011-12-10). Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication. Applied Optics 50 (35) : 6536-6542. ScholarBank@NUS Repository. 00036935 http://scholarbank.nus.edu.sg/handle/10635/56584 NOT_IN_WOS Scopus |
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| description |
Applied Optics |
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ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. |
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Article |
| author |
Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. |
| spellingShingle |
Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| author_sort |
Tang, M. |
| title |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_short |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_full |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_fullStr |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_full_unstemmed |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_sort |
maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56584 |
| _version_ |
1681084708286365696 |