Micromechanical resonators with sub-micron capacitive gaps in 2 μm process

10.1049/el:20072841

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Bibliographic Details
Main Authors:	Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56623
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56623
record_format	dspace
spelling	sg-nus-scholar.10635-566232024-11-09T07:24:30Z Micromechanical resonators with sub-micron capacitive gaps in 2 μm process Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W. ELECTRICAL & COMPUTER ENGINEERING 10.1049/el:20072841 Electronics Letters 43 25 1427-1428 ELLEA 2014-06-17T02:56:42Z 2014-06-17T02:56:42Z 2007 Article Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W. (2007). Micromechanical resonators with sub-micron capacitive gaps in 2 μm process. Electronics Letters 43 (25) : 1427-1428. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20072841 00135194 http://scholarbank.nus.edu.sg/handle/10635/56623 000252315600019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1049/el:20072841
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W.
format	Article
author	Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W.
spellingShingle	Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W. Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
author_sort	Shao, L.C.
title	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_short	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_full	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_fullStr	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_full_unstemmed	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_sort	micromechanical resonators with sub-micron capacitive gaps in 2 μm process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56623
_version_	1821201134689189888

Micromechanical resonators with sub-micron capacitive gaps in 2 μm process

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