Nanoscale imaging with a portable field emission scanning electron microscope

10.1016/j.mee.2006.01.003

Saved in:

Bibliographic Details
Main Authors:	Khursheed, A., Nelliyan, K., Ding, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Immersion electron lens Landing energy SEM
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56763
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-56763
record_format	dspace
spelling	sg-nus-scholar.10635-567632023-10-30T22:13:02Z Nanoscale imaging with a portable field emission scanning electron microscope Khursheed, A. Nelliyan, K. Ding, Y. ELECTRICAL & COMPUTER ENGINEERING Immersion electron lens Landing energy SEM 10.1016/j.mee.2006.01.003 Microelectronic Engineering 83 4-9 SPEC. ISS. 762-766 MIENE 2014-06-17T02:58:21Z 2014-06-17T02:58:21Z 2006-04 Article Khursheed, A., Nelliyan, K., Ding, Y. (2006-04). Nanoscale imaging with a portable field emission scanning electron microscope. Microelectronic Engineering 83 (4-9 SPEC. ISS.) : 762-766. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2006.01.003 01679317 http://scholarbank.nus.edu.sg/handle/10635/56763 000237581900036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Immersion electron lens Landing energy SEM
spellingShingle	Immersion electron lens Landing energy SEM Khursheed, A. Nelliyan, K. Ding, Y. Nanoscale imaging with a portable field emission scanning electron microscope
description	10.1016/j.mee.2006.01.003
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khursheed, A. Nelliyan, K. Ding, Y.
format	Article
author	Khursheed, A. Nelliyan, K. Ding, Y.
author_sort	Khursheed, A.
title	Nanoscale imaging with a portable field emission scanning electron microscope
title_short	Nanoscale imaging with a portable field emission scanning electron microscope
title_full	Nanoscale imaging with a portable field emission scanning electron microscope
title_fullStr	Nanoscale imaging with a portable field emission scanning electron microscope
title_full_unstemmed	Nanoscale imaging with a portable field emission scanning electron microscope
title_sort	nanoscale imaging with a portable field emission scanning electron microscope
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56763
_version_	1781781274261716992

Nanoscale imaging with a portable field emission scanning electron microscope

Similar Items