A study of electrostatic spring softening for dual-axis micromirror

10.1016/j.ijleo.2005.10.013

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Bibliographic Details
Main Authors:	Zhao, Y., E H Tay, F., Zhou, G., Siong Chau, F.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Dual-axis micromirror Electrostatic spring softening MEMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59280
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Institution:	National University of Singapore

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Summary:	10.1016/j.ijleo.2005.10.013

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