Alignment tolerances and optimal design of MEMS-driven Alvarez lenses

10.1088/2040-8978/15/12/125711

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Bibliographic Details
Main Authors: Zou, Y., Zhou, G., Du, Y., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59400
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Institution: National University of Singapore