Novel InP-based optical MEMS device
10.1117/1.2959175
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sg-nus-scholar.10635-609052023-10-26T09:14:49Z Novel InP-based optical MEMS device Tay, C.J. Akkipeddi, R. Gopal, M. MECHANICAL ENGINEERING InP-based Fabry-Perot membranes Interferometry Raman spectroscopy 10.1117/1.2959175 Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 3 - JMMMG 2014-06-17T06:28:43Z 2014-06-17T06:28:43Z 2008 Article Tay, C.J., Akkipeddi, R., Gopal, M. (2008). Novel InP-based optical MEMS device. Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.2959175 19325150 http://scholarbank.nus.edu.sg/handle/10635/60905 000260675200018 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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InP-based Fabry-Perot membranes Interferometry Raman spectroscopy |
| spellingShingle |
InP-based Fabry-Perot membranes Interferometry Raman spectroscopy Tay, C.J. Akkipeddi, R. Gopal, M. Novel InP-based optical MEMS device |
| description |
10.1117/1.2959175 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tay, C.J. Akkipeddi, R. Gopal, M. |
| format |
Article |
| author |
Tay, C.J. Akkipeddi, R. Gopal, M. |
| author_sort |
Tay, C.J. |
| title |
Novel InP-based optical MEMS device |
| title_short |
Novel InP-based optical MEMS device |
| title_full |
Novel InP-based optical MEMS device |
| title_fullStr |
Novel InP-based optical MEMS device |
| title_full_unstemmed |
Novel InP-based optical MEMS device |
| title_sort |
novel inp-based optical mems device |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60905 |
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1781781938245206016 |