Optical micro-shadowgraph-based method for measuring micro-solderball height

Optical micro-shadowgraph-based method for measuring micro-solderball height

10.1117/1.1906003

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Bibliographic Details
Main Authors: Wang, S., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Geometrical optics
Metrology
Micro-solderballs
Microscopy
Optical shadowgraphs
Semiconductor wafers
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61010
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/61010

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