Surface chemical modification for exceptional wear life of MEMS materials
10.1063/1.3662096
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2014
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sg-nus-scholar.10635-614232023-10-29T22:54:12Z Surface chemical modification for exceptional wear life of MEMS materials Singh, R.A. Satyanarayana, N. Sinha, S.K. MECHANICAL ENGINEERING 10.1063/1.3662096 AIP Advances 1 4 - 2014-06-17T06:34:57Z 2014-06-17T06:34:57Z 2011 Article Singh, R.A., Satyanarayana, N., Sinha, S.K. (2011). Surface chemical modification for exceptional wear life of MEMS materials. AIP Advances 1 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3662096 21583226 http://scholarbank.nus.edu.sg/handle/10635/61423 000302141100066 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.3662096 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Singh, R.A. Satyanarayana, N. Sinha, S.K. |
| format |
Article |
| author |
Singh, R.A. Satyanarayana, N. Sinha, S.K. |
| spellingShingle |
Singh, R.A. Satyanarayana, N. Sinha, S.K. Surface chemical modification for exceptional wear life of MEMS materials |
| author_sort |
Singh, R.A. |
| title |
Surface chemical modification for exceptional wear life of MEMS materials |
| title_short |
Surface chemical modification for exceptional wear life of MEMS materials |
| title_full |
Surface chemical modification for exceptional wear life of MEMS materials |
| title_fullStr |
Surface chemical modification for exceptional wear life of MEMS materials |
| title_full_unstemmed |
Surface chemical modification for exceptional wear life of MEMS materials |
| title_sort |
surface chemical modification for exceptional wear life of mems materials |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/61423 |
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1781782047826640896 |