Theoretical analysis and experiment of a novel dep chip with 3-D silicon electrodes
10.1142/S0218194005002154
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Main Authors: | Yu, L., Tay, F.E.H., Xu, G., Ilscu, C., Avram, M. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/61536 |
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Institution: | National University of Singapore |
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