Atom diffusion during MBE growth on patterned substrate

Microelectronic Engineering

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Bibliographic Details
Main Authors: Jian, J., Zhou, J.X., Zhong, Z., Soo-Jin, C.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61870
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Institution: National University of Singapore
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Summary:Microelectronic Engineering