Distribution of photoresist over GaAs mesa structures

Journal of the Electrochemical Society

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Bibliographic Details
Main Authors:	Ramam, A., Chua, S.J.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62056
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62056
record_format	dspace
spelling	sg-nus-scholar.10635-620562015-04-06T00:04:06Z Distribution of photoresist over GaAs mesa structures Ramam, A. Chua, S.J. ELECTRICAL ENGINEERING Journal of the Electrochemical Society 141 2 576-578 JESOA 2014-06-17T06:46:57Z 2014-06-17T06:46:57Z 1994-02 Article Ramam, A.,Chua, S.J. (1994-02). Distribution of photoresist over GaAs mesa structures. Journal of the Electrochemical Society 141 (2) : 576-578. ScholarBank@NUS Repository. 00134651 http://scholarbank.nus.edu.sg/handle/10635/62056 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of the Electrochemical Society
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ramam, A. Chua, S.J.
format	Article
author	Ramam, A. Chua, S.J.
spellingShingle	Ramam, A. Chua, S.J. Distribution of photoresist over GaAs mesa structures
author_sort	Ramam, A.
title	Distribution of photoresist over GaAs mesa structures
title_short	Distribution of photoresist over GaAs mesa structures
title_full	Distribution of photoresist over GaAs mesa structures
title_fullStr	Distribution of photoresist over GaAs mesa structures
title_full_unstemmed	Distribution of photoresist over GaAs mesa structures
title_sort	distribution of photoresist over gaas mesa structures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62056
_version_	1681085706031595520

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