Experimental investigation into the use of micro-extraction fields for electron beam testing

Microelectronic Engineering

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Bibliographic Details
Main Authors:	Khursheed, A., Goh, S.P.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Electron beam test Micro-extraction fields Transverse local field effects Voltage contrast
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62167
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62167
record_format	dspace
spelling	sg-nus-scholar.10635-621672015-02-07T23:00:45Z Experimental investigation into the use of micro-extraction fields for electron beam testing Khursheed, A. Goh, S.P. ELECTRICAL ENGINEERING Electron beam test Micro-extraction fields Transverse local field effects Voltage contrast Microelectronic Engineering 34 2 171-185 MIENE 2014-06-17T06:48:07Z 2014-06-17T06:48:07Z 1997-09 Article Khursheed, A.,Goh, S.P. (1997-09). Experimental investigation into the use of micro-extraction fields for electron beam testing. Microelectronic Engineering 34 (2) : 171-185. ScholarBank@NUS Repository. 01679317 http://scholarbank.nus.edu.sg/handle/10635/62167 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Electron beam test Micro-extraction fields Transverse local field effects Voltage contrast
spellingShingle	Electron beam test Micro-extraction fields Transverse local field effects Voltage contrast Khursheed, A. Goh, S.P. Experimental investigation into the use of micro-extraction fields for electron beam testing
description	Microelectronic Engineering
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Khursheed, A. Goh, S.P.
format	Article
author	Khursheed, A. Goh, S.P.
author_sort	Khursheed, A.
title	Experimental investigation into the use of micro-extraction fields for electron beam testing
title_short	Experimental investigation into the use of micro-extraction fields for electron beam testing
title_full	Experimental investigation into the use of micro-extraction fields for electron beam testing
title_fullStr	Experimental investigation into the use of micro-extraction fields for electron beam testing
title_full_unstemmed	Experimental investigation into the use of micro-extraction fields for electron beam testing
title_sort	experimental investigation into the use of micro-extraction fields for electron beam testing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62167
_version_	1681085726404378624

Experimental investigation into the use of micro-extraction fields for electron beam testing

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