Experimental investigation into the use of micro-extraction fields for electron beam testing

• Main Authors: Khursheed, A., Goh, S.P.
• 其他作者: ELECTRICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Electron beam test; Micro-extraction fields; Transverse local field effects; Voltage contrast
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/62167

Microelectronic Engineering