Golden-template self-generating method for patterned wafer inspection
10.1007/s001380050133
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sg-nus-scholar.10635-622622023-10-31T07:05:41Z Golden-template self-generating method for patterned wafer inspection Xie, P. Guan, S.-U. ELECTRICAL ENGINEERING 10.1007/s001380050133 Machine Vision and Applications 12 3 149-156 MVAPE 2014-06-17T06:49:08Z 2014-06-17T06:49:08Z 2000-10 Article Xie, P., Guan, S.-U. (2000-10). Golden-template self-generating method for patterned wafer inspection. Machine Vision and Applications 12 (3) : 149-156. ScholarBank@NUS Repository. https://doi.org/10.1007/s001380050133 09328092 http://scholarbank.nus.edu.sg/handle/10635/62262 000089927000005 Scopus |
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10.1007/s001380050133 |
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ELECTRICAL ENGINEERING |
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ELECTRICAL ENGINEERING Xie, P. Guan, S.-U. |
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Article |
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Xie, P. Guan, S.-U. |
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Xie, P. Guan, S.-U. Golden-template self-generating method for patterned wafer inspection |
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Xie, P. |
title |
Golden-template self-generating method for patterned wafer inspection |
title_short |
Golden-template self-generating method for patterned wafer inspection |
title_full |
Golden-template self-generating method for patterned wafer inspection |
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Golden-template self-generating method for patterned wafer inspection |
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Golden-template self-generating method for patterned wafer inspection |
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golden-template self-generating method for patterned wafer inspection |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/62262 |
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