Golden-template self-generating method for patterned wafer inspection
10.1007/s001380050133
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sg-nus-scholar.10635-622622024-11-14T08:59:16Z Golden-template self-generating method for patterned wafer inspection Xie, P. Guan, S.-U. ELECTRICAL ENGINEERING 10.1007/s001380050133 Machine Vision and Applications 12 3 149-156 MVAPE 2014-06-17T06:49:08Z 2014-06-17T06:49:08Z 2000-10 Article Xie, P., Guan, S.-U. (2000-10). Golden-template self-generating method for patterned wafer inspection. Machine Vision and Applications 12 (3) : 149-156. ScholarBank@NUS Repository. https://doi.org/10.1007/s001380050133 09328092 http://scholarbank.nus.edu.sg/handle/10635/62262 000089927000005 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1007/s001380050133 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Xie, P. Guan, S.-U. |
| format |
Article |
| author |
Xie, P. Guan, S.-U. |
| spellingShingle |
Xie, P. Guan, S.-U. Golden-template self-generating method for patterned wafer inspection |
| author_sort |
Xie, P. |
| title |
Golden-template self-generating method for patterned wafer inspection |
| title_short |
Golden-template self-generating method for patterned wafer inspection |
| title_full |
Golden-template self-generating method for patterned wafer inspection |
| title_fullStr |
Golden-template self-generating method for patterned wafer inspection |
| title_full_unstemmed |
Golden-template self-generating method for patterned wafer inspection |
| title_sort |
golden-template self-generating method for patterned wafer inspection |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/62262 |
| _version_ |
1821232222349295616 |