Laser cleaning of silicon surface with deposition of different liquid films

Applied Surface Science

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Bibliographic Details
Main Authors:	Lu, Y.F., Zhang, Y., Wan, Y.H., Song, W.D.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Bubble growth Cleaning threshold Laser cleaning Stress wave
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62370
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62370
record_format	dspace
spelling	sg-nus-scholar.10635-623702015-01-07T10:43:28Z Laser cleaning of silicon surface with deposition of different liquid films Lu, Y.F. Zhang, Y. Wan, Y.H. Song, W.D. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Bubble growth Cleaning threshold Laser cleaning Stress wave Applied Surface Science 138-139 1-4 140-144 ASUSE 2014-06-17T06:50:19Z 2014-06-17T06:50:19Z 1999-01 Article Lu, Y.F.,Zhang, Y.,Wan, Y.H.,Song, W.D. (1999-01). Laser cleaning of silicon surface with deposition of different liquid films. Applied Surface Science 138-139 (1-4) : 140-144. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/62370 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Bubble growth Cleaning threshold Laser cleaning Stress wave
spellingShingle	Bubble growth Cleaning threshold Laser cleaning Stress wave Lu, Y.F. Zhang, Y. Wan, Y.H. Song, W.D. Laser cleaning of silicon surface with deposition of different liquid films
description	Applied Surface Science
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.F. Zhang, Y. Wan, Y.H. Song, W.D.
format	Article
author	Lu, Y.F. Zhang, Y. Wan, Y.H. Song, W.D.
author_sort	Lu, Y.F.
title	Laser cleaning of silicon surface with deposition of different liquid films
title_short	Laser cleaning of silicon surface with deposition of different liquid films
title_full	Laser cleaning of silicon surface with deposition of different liquid films
title_fullStr	Laser cleaning of silicon surface with deposition of different liquid films
title_full_unstemmed	Laser cleaning of silicon surface with deposition of different liquid films
title_sort	laser cleaning of silicon surface with deposition of different liquid films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62370
_version_	1681085763317399552

Laser cleaning of silicon surface with deposition of different liquid films

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