Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents

Japanese Journal of Applied Physics, Part 2: Letters

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書目詳細資料
Main Authors: Lu, Yong-Feng, Aoyagi, Yoshinobu
其他作者: ELECTRICAL ENGINEERING
格式: Article
出版: 2014
在線閱讀:http://scholarbank.nus.edu.sg/handle/10635/62372
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