Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements

Solid-State Electronics

Saved in:

Bibliographic Details
Main Authors:	Tan, L.S., Leong, M.S., Choo, S.C.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62871
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-62871
record_format	dspace
spelling	sg-nus-scholar.10635-628712024-11-09T11:59:37Z Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements Tan, L.S. Leong, M.S. Choo, S.C. ELECTRICAL ENGINEERING Solid-State Electronics 42 4 589-594 SSELA 2014-06-17T06:55:48Z 2014-06-17T06:55:48Z 1998-04-06 Article Tan, L.S.,Leong, M.S.,Choo, S.C. (1998-04-06). Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements. Solid-State Electronics 42 (4) : 589-594. ScholarBank@NUS Repository. 00381101 http://scholarbank.nus.edu.sg/handle/10635/62871 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Solid-State Electronics
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Tan, L.S. Leong, M.S. Choo, S.C.
format	Article
author	Tan, L.S. Leong, M.S. Choo, S.C.
spellingShingle	Tan, L.S. Leong, M.S. Choo, S.C. Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
author_sort	Tan, L.S.
title	Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
title_short	Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
title_full	Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
title_fullStr	Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
title_full_unstemmed	Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
title_sort	theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62871
_version_	1821199117934657536

Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements

Similar Items