X-ray stress evaluation in phase change GeSbTe material and TiW electrodes
10.1143/JJAP.49.058003
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sg-nus-scholar.10635-650632023-10-26T07:29:52Z X-ray stress evaluation in phase change GeSbTe material and TiW electrodes Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. MATERIALS SCIENCE AND ENGINEERING 10.1143/JJAP.49.058003 Japanese Journal of Applied Physics 49 5 PART 1 0580031-0580032 2014-06-17T08:00:43Z 2014-06-17T08:00:43Z 2010-05 Article Li, M., Shi, L., Zhao, R., Chong, T.C., Li, Y. (2010-05). X-ray stress evaluation in phase change GeSbTe material and TiW electrodes. Japanese Journal of Applied Physics 49 (5 PART 1) : 0580031-0580032. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.49.058003 00214922 http://scholarbank.nus.edu.sg/handle/10635/65063 000277998700066 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1143/JJAP.49.058003 |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. |
| format |
Article |
| author |
Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. |
| spellingShingle |
Li, M. Shi, L. Zhao, R. Chong, T.C. Li, Y. X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| author_sort |
Li, M. |
| title |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_short |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_full |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_fullStr |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_full_unstemmed |
X-ray stress evaluation in phase change GeSbTe material and TiW electrodes |
| title_sort |
x-ray stress evaluation in phase change gesbte material and tiw electrodes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/65063 |
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1781782555697086464 |