Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface

10.1116/1.1340653

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Bibliographic Details
Main Authors:	Zhang, Y., Tan, K.L., Liaw, B.Y., Liaw, D.J., Kang, E.T., Neoh, K.G.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/66880
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-66880
record_format	dspace
spelling	sg-nus-scholar.10635-668802021-09-30T21:39:19Z Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface Zhang, Y. Tan, K.L. Liaw, B.Y. Liaw, D.J. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING PHYSICS 10.1116/1.1340653 Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 2 547-556 JVTAD 2014-06-17T08:35:33Z 2014-06-17T08:35:33Z 2001-03 Zhang, Y., Tan, K.L., Liaw, B.Y., Liaw, D.J., Kang, E.T., Neoh, K.G. (2001-03). Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (2) : 547-556. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1340653 07342101 http://scholarbank.nus.edu.sg/handle/10635/66880 000167591600024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1340653
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Zhang, Y. Tan, K.L. Liaw, B.Y. Liaw, D.J. Kang, E.T. Neoh, K.G.
author	Zhang, Y. Tan, K.L. Liaw, B.Y. Liaw, D.J. Kang, E.T. Neoh, K.G.
spellingShingle	Zhang, Y. Tan, K.L. Liaw, B.Y. Liaw, D.J. Kang, E.T. Neoh, K.G. Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
author_sort	Zhang, Y.
title	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
title_short	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
title_full	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
title_fullStr	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
title_full_unstemmed	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
title_sort	thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized si(100) surface
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/66880
_version_	1713206168499781632

Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface

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