Wafer location integrity in aluminum metallization

10.1016/j.mee.2004.04.002

Saved in:

Bibliographic Details
Main Authors:	Ng, T.W., Lau, S.H.
Other Authors:	BACHELOR OF TECHNOLOGY PROGRAMME
Format:	Article
Published:	2014
Subjects:	Position metallization aluminum Wafer metrology
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/67815
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-67815
record_format	dspace
spelling	sg-nus-scholar.10635-678152023-10-25T20:14:28Z Wafer location integrity in aluminum metallization Ng, T.W. Lau, S.H. BACHELOR OF TECHNOLOGY PROGRAMME Position metallization aluminum Wafer metrology 10.1016/j.mee.2004.04.002 Microelectronic Engineering 75 2 172-176 MIENE 2014-06-18T05:09:39Z 2014-06-18T05:09:39Z 2004-08 Article Ng, T.W., Lau, S.H. (2004-08). Wafer location integrity in aluminum metallization. Microelectronic Engineering 75 (2) : 172-176. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2004.04.002 01679317 http://scholarbank.nus.edu.sg/handle/10635/67815 000223442000007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Position metallization aluminum Wafer metrology
spellingShingle	Position metallization aluminum Wafer metrology Ng, T.W. Lau, S.H. Wafer location integrity in aluminum metallization
description	10.1016/j.mee.2004.04.002
author2	BACHELOR OF TECHNOLOGY PROGRAMME
author_facet	BACHELOR OF TECHNOLOGY PROGRAMME Ng, T.W. Lau, S.H.
format	Article
author	Ng, T.W. Lau, S.H.
author_sort	Ng, T.W.
title	Wafer location integrity in aluminum metallization
title_short	Wafer location integrity in aluminum metallization
title_full	Wafer location integrity in aluminum metallization
title_fullStr	Wafer location integrity in aluminum metallization
title_full_unstemmed	Wafer location integrity in aluminum metallization
title_sort	wafer location integrity in aluminum metallization
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/67815
_version_	1781782924027232256

Wafer location integrity in aluminum metallization

Similar Items