A low-voltage vibratory microgyroscope with ASIC control

10.1117/12.425357

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Bibliographic Details
Main Authors:	Liang, Y.C., Zhao, T., Xu, Y.P., Boh, S.S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	ASIC Comb drive Microgyroscope Parallel plate actuation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68864
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Institution:	National University of Singapore

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Summary:	10.1117/12.425357

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