Applying kirigami models in teaching micro-electro-mechanical systems

Applying kirigami models in teaching micro-electro-mechanical systems

10.1109/IEDEC.2013.6526765

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Bibliographic Details
Main Author: Liang, Y.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Micromachining
Paper Model
Silicon Microsystem
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69441
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69441

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