Development for precise positioning of air bearing stages
10.1109/ICMA.2012.6285119
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2014
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sg-nus-scholar.10635-699042024-11-12T08:54:06Z Development for precise positioning of air bearing stages Tan, K.K. Huang, S. Liang, W. Yu, S. ELECTRICAL & COMPUTER ENGINEERING Air bearing system control eddy current magnetic field 10.1109/ICMA.2012.6285119 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 1943-1948 2014-06-19T03:05:59Z 2014-06-19T03:05:59Z 2012 Conference Paper Tan, K.K.,Huang, S.,Liang, W.,Yu, S. (2012). Development for precise positioning of air bearing stages. 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 : 1943-1948. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICMA.2012.6285119" target="_blank">https://doi.org/10.1109/ICMA.2012.6285119</a> 9781467312776 http://scholarbank.nus.edu.sg/handle/10635/69904 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| topic |
Air bearing system control eddy current magnetic field |
| spellingShingle |
Air bearing system control eddy current magnetic field Tan, K.K. Huang, S. Liang, W. Yu, S. Development for precise positioning of air bearing stages |
| description |
10.1109/ICMA.2012.6285119 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, K.K. Huang, S. Liang, W. Yu, S. |
| format |
Conference or Workshop Item |
| author |
Tan, K.K. Huang, S. Liang, W. Yu, S. |
| author_sort |
Tan, K.K. |
| title |
Development for precise positioning of air bearing stages |
| title_short |
Development for precise positioning of air bearing stages |
| title_full |
Development for precise positioning of air bearing stages |
| title_fullStr |
Development for precise positioning of air bearing stages |
| title_full_unstemmed |
Development for precise positioning of air bearing stages |
| title_sort |
development for precise positioning of air bearing stages |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69904 |
| _version_ |
1821211118026096640 |