Fabrication of magnetic nanostructures using KrF lithography

2004 4th IEEE Conference on Nanotechnology

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Bibliographic Details
Main Authors:	Singh, N., Goolaup, S., Adeyeye, A.O.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Lift-off Lithography Magnetic nanostructures Nanofabrication Phase shift mask
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70279
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70279
record_format	dspace
spelling	sg-nus-scholar.10635-702792015-03-27T17:49:16Z Fabrication of magnetic nanostructures using KrF lithography Singh, N. Goolaup, S. Adeyeye, A.O. ELECTRICAL & COMPUTER ENGINEERING Lift-off Lithography Magnetic nanostructures Nanofabrication Phase shift mask 2004 4th IEEE Conference on Nanotechnology 65-67 2014-06-19T03:10:18Z 2014-06-19T03:10:18Z 2004 Conference Paper Singh, N.,Goolaup, S.,Adeyeye, A.O. (2004). Fabrication of magnetic nanostructures using KrF lithography. 2004 4th IEEE Conference on Nanotechnology : 65-67. ScholarBank@NUS Repository. 0780385365 http://scholarbank.nus.edu.sg/handle/10635/70279 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Lift-off Lithography Magnetic nanostructures Nanofabrication Phase shift mask
spellingShingle	Lift-off Lithography Magnetic nanostructures Nanofabrication Phase shift mask Singh, N. Goolaup, S. Adeyeye, A.O. Fabrication of magnetic nanostructures using KrF lithography
description	2004 4th IEEE Conference on Nanotechnology
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Singh, N. Goolaup, S. Adeyeye, A.O.
format	Conference or Workshop Item
author	Singh, N. Goolaup, S. Adeyeye, A.O.
author_sort	Singh, N.
title	Fabrication of magnetic nanostructures using KrF lithography
title_short	Fabrication of magnetic nanostructures using KrF lithography
title_full	Fabrication of magnetic nanostructures using KrF lithography
title_fullStr	Fabrication of magnetic nanostructures using KrF lithography
title_full_unstemmed	Fabrication of magnetic nanostructures using KrF lithography
title_sort	fabrication of magnetic nanostructures using krf lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70279
_version_	1681087169874100224

Fabrication of magnetic nanostructures using KrF lithography

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