In-situ fault detection of wafer warpage in lithography

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Main Authors:	Tay, A., Ho, W.K., Yap, C., Wei, C., Tsai, K.-Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Disturbance signal Fault detection Feedforward control Models Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70607
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70607
record_format	dspace
spelling	sg-nus-scholar.10635-706072015-01-11T05:49:28Z In-situ fault detection of wafer warpage in lithography Tay, A. Ho, W.K. Yap, C. Wei, C. Tsai, K.-Y. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Disturbance signal Fault detection Feedforward control Models Temperature control IFAC Proceedings Volumes (IFAC-PapersOnline) 16 67-72 2014-06-19T03:14:06Z 2014-06-19T03:14:06Z 2005 Conference Paper Tay, A.,Ho, W.K.,Yap, C.,Wei, C.,Tsai, K.-Y. (2005). In-situ fault detection of wafer warpage in lithography. IFAC Proceedings Volumes (IFAC-PapersOnline) 16 : 67-72. ScholarBank@NUS Repository. 008045108X 14746670 http://scholarbank.nus.edu.sg/handle/10635/70607 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Disturbance signal Fault detection Feedforward control Models Temperature control
spellingShingle	Disturbance signal Fault detection Feedforward control Models Temperature control Tay, A. Ho, W.K. Yap, C. Wei, C. Tsai, K.-Y. In-situ fault detection of wafer warpage in lithography
description	IFAC Proceedings Volumes (IFAC-PapersOnline)
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Yap, C. Wei, C. Tsai, K.-Y.
format	Conference or Workshop Item
author	Tay, A. Ho, W.K. Yap, C. Wei, C. Tsai, K.-Y.
author_sort	Tay, A.
title	In-situ fault detection of wafer warpage in lithography
title_short	In-situ fault detection of wafer warpage in lithography
title_full	In-situ fault detection of wafer warpage in lithography
title_fullStr	In-situ fault detection of wafer warpage in lithography
title_full_unstemmed	In-situ fault detection of wafer warpage in lithography
title_sort	in-situ fault detection of wafer warpage in lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70607
_version_	1681087231035441152

In-situ fault detection of wafer warpage in lithography

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