Investigation of effect of germanium on the crystallization process of hafnium aluminum oxide matrix

10.1149/1.2890420

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Bibliographic Details
Main Authors: Zheng, F., Choi, W.K., Chew, H.G., Chan, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70677
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Institution: National University of Singapore
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