Low resistivity glass metallization by laser induced plasma assisted ablation (LIPAA)

• Main Authors: Hong, M.H., Xie, Q., Lim, B.C., Sugioka, K., Midorikawa, K., Ye, K.D., Shi, L.P., Chong, T.C.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Glass metallization; Laser annealing; Laser induced plasma assisted ablation; Resistivity; Thin film ablation
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/70839
• 機構: National University of Singapore

10.1117/12.596543