Nanopatterning and selective area epitaxy of GaN on Si substrate

10.1117/12.762149

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Bibliographic Details
Main Authors:	Wang, L.S., Chua, S.J., Tripathy, S., Zang, K.Y., Wang, B.Z., Teng, J.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	GaN on Si substrate Micro-structural characterization Nanopatterning Optical spectroscopy Selective area epitaxy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71088
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-710882023-10-30T09:13:08Z Nanopatterning and selective area epitaxy of GaN on Si substrate Wang, L.S. Chua, S.J. Tripathy, S. Zang, K.Y. Wang, B.Z. Teng, J.H. ELECTRICAL & COMPUTER ENGINEERING GaN on Si substrate Micro-structural characterization Nanopatterning Optical spectroscopy Selective area epitaxy 10.1117/12.762149 Proceedings of SPIE - The International Society for Optical Engineering 6894 - PSISD 2014-06-19T03:19:42Z 2014-06-19T03:19:42Z 2008 Conference Paper Wang, L.S., Chua, S.J., Tripathy, S., Zang, K.Y., Wang, B.Z., Teng, J.H. (2008). Nanopatterning and selective area epitaxy of GaN on Si substrate. Proceedings of SPIE - The International Society for Optical Engineering 6894 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.762149 9780819470690 0277786X http://scholarbank.nus.edu.sg/handle/10635/71088 000254733800005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	GaN on Si substrate Micro-structural characterization Nanopatterning Optical spectroscopy Selective area epitaxy
spellingShingle	GaN on Si substrate Micro-structural characterization Nanopatterning Optical spectroscopy Selective area epitaxy Wang, L.S. Chua, S.J. Tripathy, S. Zang, K.Y. Wang, B.Z. Teng, J.H. Nanopatterning and selective area epitaxy of GaN on Si substrate
description	10.1117/12.762149
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, L.S. Chua, S.J. Tripathy, S. Zang, K.Y. Wang, B.Z. Teng, J.H.
format	Conference or Workshop Item
author	Wang, L.S. Chua, S.J. Tripathy, S. Zang, K.Y. Wang, B.Z. Teng, J.H.
author_sort	Wang, L.S.
title	Nanopatterning and selective area epitaxy of GaN on Si substrate
title_short	Nanopatterning and selective area epitaxy of GaN on Si substrate
title_full	Nanopatterning and selective area epitaxy of GaN on Si substrate
title_fullStr	Nanopatterning and selective area epitaxy of GaN on Si substrate
title_full_unstemmed	Nanopatterning and selective area epitaxy of GaN on Si substrate
title_sort	nanopatterning and selective area epitaxy of gan on si substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71088
_version_	1781783192502534144

Nanopatterning and selective area epitaxy of GaN on Si substrate

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