Precision motion control system for ultra-precision semiconductor and electon components manufacturing
Proceedings - Electronic Components and Technology Conference
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2014
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sg-nus-scholar.10635-714892015-01-16T23:10:15Z Precision motion control system for ultra-precision semiconductor and electon components manufacturing Tan, K.K. Dou, H.F. Tang, K.Z. ELECTRICAL & COMPUTER ENGINEERING Proceedings - Electronic Components and Technology Conference 1372-1379 PECCA 2014-06-19T03:24:19Z 2014-06-19T03:24:19Z 2001 Conference Paper Tan, K.K.,Dou, H.F.,Tang, K.Z. (2001). Precision motion control system for ultra-precision semiconductor and electon components manufacturing. Proceedings - Electronic Components and Technology Conference : 1372-1379. ScholarBank@NUS Repository. 05695503 http://scholarbank.nus.edu.sg/handle/10635/71489 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Proceedings - Electronic Components and Technology Conference |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, K.K. Dou, H.F. Tang, K.Z. |
| format |
Conference or Workshop Item |
| author |
Tan, K.K. Dou, H.F. Tang, K.Z. |
| spellingShingle |
Tan, K.K. Dou, H.F. Tang, K.Z. Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| author_sort |
Tan, K.K. |
| title |
Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| title_short |
Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| title_full |
Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| title_fullStr |
Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| title_full_unstemmed |
Precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| title_sort |
precision motion control system for ultra-precision semiconductor and electon components manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71489 |
| _version_ |
1681087392773046272 |