Transmission EELS attachment for SEM

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors: Khursheed, A., Luo, T.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72077
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Institution: National University of Singapore
id sg-nus-scholar.10635-72077
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spelling sg-nus-scholar.10635-720772015-02-28T06:27:41Z Transmission EELS attachment for SEM Khursheed, A. Luo, T. ELECTRICAL & COMPUTER ENGINEERING Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 298-301 2014-06-19T03:31:10Z 2014-06-19T03:31:10Z 2005 Conference Paper Khursheed, A.,Luo, T. (2005). Transmission EELS attachment for SEM. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 298-301. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72077 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Khursheed, A.
Luo, T.
format Conference or Workshop Item
author Khursheed, A.
Luo, T.
spellingShingle Khursheed, A.
Luo, T.
Transmission EELS attachment for SEM
author_sort Khursheed, A.
title Transmission EELS attachment for SEM
title_short Transmission EELS attachment for SEM
title_full Transmission EELS attachment for SEM
title_fullStr Transmission EELS attachment for SEM
title_full_unstemmed Transmission EELS attachment for SEM
title_sort transmission eels attachment for sem
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/72077
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