Nanolithography by tip-enhanced laser irradiation

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Mai, Z.H., Lu, Y.F., Song, W.D., Chim, W.K.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72769
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Institution: National University of Singapore