Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
LEOS Summer Topical Meeting
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2014
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sg-nus-scholar.10635-729672015-01-31T03:26:31Z Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces Song, W.D. Lu, Y.F. Hong, M.H. Chong, T.C. Low, T.S. DATA STORAGE INSTITUTE ELECTRICAL ENGINEERING LEOS Summer Topical Meeting 2pp- 00163 2014-06-19T05:14:01Z 2014-06-19T05:14:01Z 1996 Conference Paper Song, W.D.,Lu, Y.F.,Hong, M.H.,Chong, T.C.,Low, T.S. (1996). Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces. LEOS Summer Topical Meeting : 2pp-. ScholarBank@NUS Repository. 10994742 http://scholarbank.nus.edu.sg/handle/10635/72967 NOT_IN_WOS Scopus |
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National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
LEOS Summer Topical Meeting |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Song, W.D. Lu, Y.F. Hong, M.H. Chong, T.C. Low, T.S. |
| format |
Conference or Workshop Item |
| author |
Song, W.D. Lu, Y.F. Hong, M.H. Chong, T.C. Low, T.S. |
| spellingShingle |
Song, W.D. Lu, Y.F. Hong, M.H. Chong, T.C. Low, T.S. Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| author_sort |
Song, W.D. |
| title |
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| title_short |
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| title_full |
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| title_fullStr |
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| title_full_unstemmed |
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| title_sort |
theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/72967 |
| _version_ |
1681087662035828736 |