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 _____     _    _     ______   _    _   __    __  
|  __ \\  | || | ||  /_   _// | || | || \ \\ / // 
| |  \ || | || | ||  `-| |,-  | || | ||  \ \/ //  
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|_____//   \____//     |_||    \____//     \//    
 -----`     `---`      `-`'     `---`       `

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Text this: Circular apertures for contact hole patterning in 193nm immersion lithography