Development of a fine tool servo with force monitoring system for nanomachining applications
10.1116/1.3049514
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2014
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sg-nus-scholar.10635-733352023-10-27T08:14:04Z Development of a fine tool servo with force monitoring system for nanomachining applications Gan, S.W. Rahman, M. Lim, H.S. MECHANICAL ENGINEERING 10.1116/1.3049514 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 3 1272-1277 JVTBD 2014-06-19T05:33:54Z 2014-06-19T05:33:54Z 2009 Conference Paper Gan, S.W., Rahman, M., Lim, H.S. (2009). Development of a fine tool servo with force monitoring system for nanomachining applications. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (3) : 1272-1277. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3049514 10711023 http://scholarbank.nus.edu.sg/handle/10635/73335 000266500300049 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.3049514 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Gan, S.W. Rahman, M. Lim, H.S. |
| format |
Conference or Workshop Item |
| author |
Gan, S.W. Rahman, M. Lim, H.S. |
| spellingShingle |
Gan, S.W. Rahman, M. Lim, H.S. Development of a fine tool servo with force monitoring system for nanomachining applications |
| author_sort |
Gan, S.W. |
| title |
Development of a fine tool servo with force monitoring system for nanomachining applications |
| title_short |
Development of a fine tool servo with force monitoring system for nanomachining applications |
| title_full |
Development of a fine tool servo with force monitoring system for nanomachining applications |
| title_fullStr |
Development of a fine tool servo with force monitoring system for nanomachining applications |
| title_full_unstemmed |
Development of a fine tool servo with force monitoring system for nanomachining applications |
| title_sort |
development of a fine tool servo with force monitoring system for nanomachining applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73335 |
| _version_ |
1781783300154589184 |