Improvement of form accuracy in hybrid machining of microstructures

Journal of Electronic Materials

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Bibliographic Details
Main Authors: Lim, H.S., Kumar, A.S., Rahman, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73528
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Institution: National University of Singapore
Description
Summary:Journal of Electronic Materials