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           __   __   __   __   __   __   _____    
  ____     \ \\/ //  \ \\/ //  \ \\/ // |  __ \\  
 |    \\    \ ` //    \   //    \ ` //  | |  \ || 
 | [] ||     | ||     / . \\     | ||   | |__/ || 
 |  __//     |_||    /_//\_\\    |_||   |_____//  
 |_|`-`      `-`'    `-`  --`    `-`'    -----`   
 `-`

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Text this: Mask error enhancement factor for sub 0.13μm lithography