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  _  __   _    _     ____       ___     _____    
 | |/ // | || | ||  |  _ \\    / _ \\  |  __ \\  
 | ' //  | || | ||  | |_| ||  | / \ || | |  \ || 
 | . \\  | \\_/ ||  | .  //   | \_/ || | |__/ || 
 |_|\_\\  \____//   |_|\_\\    \___//  |_____//  
 `-` --`   `---`    `-` --`    `---`    -----`

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Text this: Mask error enhancement factor for sub 0.13μm lithography